SIST EN ISO 25178-605:2025

SLOVENSKI STANDARD
01-maj-2025
Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ploskovna -
605. del: Konstrukcije in značilnosti brezkontaktnih (točka avtofokusne sonde)
instrumentov (ISO 25178-605:2025)
Geometrical product specifications (GPS) - Surface texture: Areal - Part 605: Design and
characteristics of non-contact (point autofocus probe) instruments (ISO 25178-605:2025)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 605: Aufbau und Merkmale von berührungslos messenden Geräten (Punkt-
Autofokus-Sensor) (ISO 25178-605:2025)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 605:
Conception et caractéristiques des instruments sans contact (capteur autofocus à point)
(ISO 25178-605:2025)
Ta slovenski standard je istoveten z: EN ISO 25178-605:2025
ICS:
17.040.20 Lastnosti površin Properties of surfaces
17.040.40 Specifikacija geometrijskih Geometrical Product
veličin izdelka (GPS) Specification (GPS)
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 25178-605
EUROPEAN STANDARD
NORME EUROPÉENNE
February 2025
EUROPÄISCHE NORM
ICS 17.040.20 Supersedes EN ISO 25178-605:2014
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 605: Design and characteristics of non-contact
(point autofocus probe) instruments (ISO 25178-
605:2025)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 605: Conception et Oberflächenbeschaffenheit: Flächenhaft - Teil 605:
caractéristiques des instruments sans contact (capteur Aufbau und Merkmale von berührungslos messenden
autofocus à point) (ISO 25178-605:2025) Geräten (Punkt-Autofokus-Sensor) (ISO 25178-
605:2025)
This European Standard was approved by CEN on 21 February 2025.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2025 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-605:2025 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
This document (EN ISO 25178-605:2025) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the
secretariat of which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by August 2025, and conflicting national standards shall
be withdrawn at the latest by August 2025.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
This document supersedes EN ISO 25178-605:2014.
Any feedback and questions on this document should be directed to the users’ national standards
body/national committee. A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 25178-605:2025 has been approved by CEN as EN ISO 25178-605:2025 without any
modification.
International
Standard
ISO 25178-605
Second edition
Geometrical product specifications
2025-02
(GPS) — Surface texture: Areal —
Part 605:
Design and characteristics of non-
contact (point autofocus probe)
instruments
Spécification géométrique des produits (GPS) — État de surface:
Surfacique —
Partie 605: Conception et caractéristiques des instruments sans
contact (capteur autofocus à point)
Reference number
ISO 25178-605:2025(en) © ISO 2025

ISO 25178-605:2025(en)
© ISO 2025
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
or ISO’s member body in the country of the requester.
ISO copyright office
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CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii
ISO 25178-605:2025(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Instrument requirements . 3
5 Metrological characteristics . 4
6 Design features . 4
7 General information . 4
Annex A (informative) Principles of PAP instruments for areal surface topography
measurement . 5
Annex B (informative) Sources of measurement error for PAP instruments . 9
Annex C (informative) Relationship to the GPS matrix model .15
Bibliography .16

iii
ISO 25178-605:2025(en)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
ISO technical committees. Each member body interested in a subject for which a technical committee
has been established has the right to be represented on that committee. International organizations,
governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely
with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
ISO/IEC Directives, Part 2 (see www.iso.org/directives).
ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a)
patent(s) which may be required to implement this document. However, implementers are cautioned that
this may not represent the latest information, which may be obtained from the patent database available at
www.iso.org/patents. ISO shall not be held responsible for identifying any or all such patent rights.
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and expressions
related to conformity assessment, as well as information about ISO's adherence to the World Trade
Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www.iso.org/iso/foreword.html.
This document was prepared by Technical Committee ISO/TC 213, Dimensional and geometrical product
specifications and verification, in collaboration with the European Committee for Standardization (CEN)
Technical Committee CEN/TC 290, Dimensional and geometrical product specification and verification, in
accordance with the Agreement on technical cooperation between ISO and CEN (Vienna Agreement).
This second edition cancels and replaces the first edition (ISO 25178-605:2014), which has been technically
revised.
The main changes are as follows:
— removal of the terms and definitions now specified in ISO 25178-600;
— revision of all terms and definitions for clarity and consistency with other ISO standards documents;
— addition of Clause 4 for instrument requirements, which summarizes normative features and
characteristics;
— addition of Clause 5 on metrological characteristics;
— addition of Clause 6 on design features, which clarifies the types of instruments relevant to this document;
— addition of an information flow concept diagram in Clause 4;
— revision of Annex A describing the principles of instruments addressed by this document;
— addition of Annex B on metrological characteristics and influence quantities; replacement of the
normative table of influence quantities with an informative description of common error sources and
how these relate the metrological characteristics in ISO 25178-600.
A list of all parts in the ISO 25178 series can be found on the ISO website.
Any feedback or questions on this document should be directed to the user’s national standards body. A
complete listing of these bodies can be found at www.iso.org/members.html.

iv
ISO 25178-605:2025(en)
Introduction
This document is a geometrical product specification (GPS) standard and is to be regarded as a general GPS
standard (see ISO 14638). It influences chain link F of the chains of standards on profile and areal surface
texture.
The ISO GPS matrix model given in ISO 14638 gives an overview of the ISO GPS system of which this document
is a part. The fundamental rules of ISO GPS given in ISO 8015 apply to this document and the default decision
rules given in ISO 14253-1 apply to the specifications made in accordance with this document, unless
otherwise indicated.
For more detailed information on the relation of this document to other standards and the GPS matrix model,
see Annex C.
This document includes terms and definitions relevant to the point autofocus probe (PAP) instruments for
the measurement of areal surface topography. Annex A briefly summarizes PAP instruments and methods
to clarify the definitions and to provide a foundation for Annex B, which describes common sources of
uncertainty and their relation to the metrological characteristics of PAP.
NOTE Portions of this document, particularly the informative sections, describe patented systems and methods.
This information is provided only to assist users in understanding the operating principles of PAP instruments. This
document is not intended to establish priority for any intellectual property, nor does it imply a license to proprietary
technologies described herein.

v
International Standard ISO 25178-605:2025(en)
Geometrical product specifications (GPS) — Surface
texture: Areal —
Part 605:
Design and characteristics of non-contact (point autofocus
probe) instruments
1 Scope
This document specifies the design and metrological characteristics of point autofocus probe (PAP)
instruments for the areal measurement of surface topography. Because surface profiles can be extracted
from areal surface topography data, the methods described in this document are also applicable to profiling
measurements.
2 Normative references
The following documents are referred to in the text in such a way that some or all of their content constitutes
requirements of this document. For dated references, only the edition cited applies. For undated references,
the latest edition of the referenced document (including any amendments) applies.
ISO 25178-600:2019, Geometrical product specifications (GPS) — Surface texture: Areal — Part 600:
Metrological characteristics for areal topography measuring methods
3 Terms and definitions
For the purposes of this document, the terms and definitions given in ISO 25178-600 and the following apply.
ISO and IEC maintain terminology databases for use in standardization at the following addresses:
— ISO Online browsing platform: available at https:// www .iso .org/ obp
— IEC Electropedia: available at https:// www .electropedia .org/
3.1
probing system
component of the instrument consisting of an autofocus optical system, an autofocus
mechanism (3.6) and an electronic controller
3.2
point autofocus probe
PAP
device that converts the height of a point on a surface into a signal during measurement using the autofocus
function
3.3
point autofocus profiling
surface topography measurement method whereby the local surface height is measured by automatically
centring a focused light beam reflected from the sample on a position sensitive detector as a function of
surface height
[SOURCE: ISO 25178-6:2010, 3.3.11]

ISO 25178-605:2025(en)
3.4
objective
lens that focuses the light source image on the workpiece surface
3.5
autofocus sensor
optical sensor that detects a focal position using the light reflected from the workpiece surface
3.6
autofocus mechanism
autofocus driving mechanism that positions optical elements or the whole optical system
3.7
z-position sensor
sensor that measures the vertical position of the measured point
3.8
working distance
distance along the optical axis between the element closest to the surface and the
focus point on the surface
Note 1 to entry: Maximum measurable step height is related to working distance.
3.9
spot size
W
SPOT
size of the light source image focused on the workpiece surface
Note 1 to entry: See Clause B.2.
3.10
focus range
range of z heights, within which it is possible to achieve adequate focus
3.11
vertical range
R
VERT
measuring range of the autofocus probe in z heights within which it is possible to
output reliable data
3.12
measurable minimum reflection ratio
M
REF
minimum ratio of the reflected light intensity to the incident light intensity for a measurable workpiece surface
3.13
autofocus repeatability
R
AF
measurement repeatability of the autofocus function, excluding the effect of environmental noise
3.14
speckle noise
N
SPC
noise due to non-uniform intensity of reflected light generated by irregular micro-scale geometry of the
workpiece surface within the spot size (3.9)
Note 1 to entry: Refer to Reference [10].

ISO 25178-605:2025(en)
3.15
temperature drift deviation
D , D , D
TEMx TEMy TEMz
form deviation caused by changes in temperature
Note 1 to entry: This deviation is typically managed by increasing measurement speed and reducing the rate or range
of temperature variation.
Note 2 to entry: Refer to Reference [14].
3.16
beam offset direction
direction of the offset of the light source optical axis from the optical axis of the objective (3.4)
Note 1 to entry: See Clause B.4.
4 Instrument requirements
An instrument according to this document shall perform an areal surface topography measurement of a
surface using point autofocus profiling. The instrument shall comprise a PAP and a lateral scanning system.
The PAP instrument shall comprise an objective, an autofocus sensor, a z-position sensor and an autofocus
mechanism for automatically measuring a local height of the surface. The instrument shall acquire data by
scanning the surface in x- and y-directions while autofocusing on it. The instrument shall save acquired
point cloud data in order to generate an areal topography
...